Pulsed Laser Deposition and Thermal Evaporation Coater – PLD

Desktop Thermal Evaporation Coater DTT

Our PLD Pulsed Laser Deposition system with optional Thermal Evaporation Coater provides materials research scientists a highly flexible tool for producing thin film specimens in a wide variety of formats. It can deposit complex materials and crystalline structures onto substrates with very little setup involved. The Pulsed Laser Deposition technique leads to efficient, non-thermal ablation and preserves the stoichiometry of the target materials. By applying this method it possible to deposit materials such as nitrides, oxides, super lattices, polymers, and composites.

With a dual pumping system consisting of an external vacuum pump (included) and a directly attached TMP (turbo molecular pump), the PLD Pulsed Laser Deposition system can achieve vacuum in the micro-Torr range allowing very fine grain thin films to be applied to a multitude of substrates.  Uniform thin films with superior fine-grain sizes are formed in a fast cycle time suitable for advanced materials research and high magnification scanning electron microscopy.

The PLD system is equipped with a large chamber (300 mm diameter) and three (3) source holders with motorized target selection. The laser source is not included and sits external to the chamber and utilizes the chamber windows for laser access to the source targets. For increasing film adhesion to the substrate and to improve the film structures, an optional heater allows substrate heating up to 500°C.  A mass flow controlled (MFC) gas input allows precise gas flow control and chamber pressure.

Standard Features

  • Laser ablation deposition with target manipulator and adjustable speed
  • Evaporation for 3 material sources i(option PLD-T model)
  • Unlimited deposition time without breaking vacuum
  • Evaporation Source holding – Boats, Baskets, Coils
  • 500 °C substrate heater (optional)
  • Electrical Feed-Through into process chamber
  • Two-stage, direct drive rotary vane roughing pump
  • Turbo Molecular Pump (90 L/sec Leybold)
  • Precision Mass Flow meters (MFC) for fine control of the vacuum
  • High precision quartz crystal thickness monitors (water cooled)
  • Intuitive touch screen to control the coating process
  • User friendly software that can be updated via network
  • Control coating rate to achieve finer grain structures
  • Manual or automatic Timed and Thickness deposition
  • Electronically controlled shutter
  • Electronic control of gas purge and vent
  • Easy-to-change specimen stages (rotation stage is optional)
  • 2-year Factory Warranty

Functional Ease-of-Use Features

Touch Screen Controls 

All coaters come equipped with a 7” touch screen and fully automatic control allowing easy operation even by inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coatings is also saved in the history page.

Thermal Evaporation option (boat / basket / coil)

The PLD Pulsed Laser Deposition system provides three (3) sources at 20mm size which can be rotated. The PLD-T model for the Pulsed Laser Deposition system adds the ability for Thermal Evaporation capability with holders such as Boats, Baskets, Coils from most traditional suppliers. The design of the evaporation source holder results in no contamination from source materials onto each other. The length of the source holders can be in the range of 5o to 90mm. Customized sample holder and source holders can easily be adapted.

PLD Pulsed Laser Deposition source holders

Specifications for PLD Pulsed Laser Deposition System

Vacuum 0.5 x E-6 Torr 0.5 x E-6 Torr
Laser Target Size 25mm (1") 25mm (1")
Number or Laser Targets 3 3
Source Holders n/a Boats, Baskets, Coils
Number of Evaporation Sources n/a 3
Holder Length n/a 50 to 90 mm
Chamber Size 300mm 300mm
Power Supply (2) 25V DC, 0-100A (2) 25V DC, 0-100A
Process Gas Ar, O, N Ar, O, N
Rotate Stage Optional Optional
Thickness Monitor Standard Standard
Input Power 110V 1 Phase 220V 1 Phase
Coater Dimensions (mm) 650(W)x500(D)x560(H) 650(W)x500(D)x560(H)
Shipping Weight 60 kg 60 kg