Desktop Thermal Evaporation Coater – DTT
Our DTT Desktop Thermal Evaporation Coater provides materials research scientists a highly flexible tool for producing thin film specimens in a wide variety of formats with triple source Thermal Evaporation using a variety of holders (boats, baskets, coils) for the coating materials.
With a dual pumping system consisting of an external vacuum pump (included) and a directly attached TMP (turbo molecular pump), the DTT Thermal Evaporator can achieve vacuum in the micro-Torr range allowing very fine grain thin films to be applied to a multitude of substrates. Uniform thin film deposition with superior fine-grain sizes are formed in a fast cycle time suitable for advanced materials research and high magnification scanning electron microscopy.
The DTT system is equipped with a large chamber (300 mm diameter) with a vareity of chamber height options (250 to 500mm). Three (3) evaporation source holders allow either sequential coatings or simultaneous coating of alloyed materials. For increasing film adhesion to the substrate and to improve the film structures, an optional heater allows substrate heating up to 500°C. Substrate cooling is also optional. While evaporated coatings are usually very uniform, a rotating substrate or sample holder is available as an option. An mass flow controlled (MFC) gas input allows precise gas flow control and chamber pressure.
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Metal and Dielectric Films
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Nano & Microelectronics
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Optical components coating
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Fabrication of Thin Film Sensors
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Medical Components
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Magnetic Devices
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- Thermal Evaporation process for 3 material sources in a compact system
- Unlimited deposition time without breaking vacuum
- Sequential Coatings or Simultaneous Co-Evaporation alloying (optional)
- Evaporation Source holding – Boats, Baskets, Coils
- 500 °C substrate heater (optional)
- Water Cooled Electrical Feed-Through into process chamber
- Two-stage, direct drive rotary vane roughing pump (optional oil-free pumps)
- Turbo Molecular Pump – 90 L/sec Leybold (optional 250 and 350 L/sec TMP)
- Precision Mass Flow meters (MFC) for fine control of the vacuum
- High precision quartz crystal thickness monitors (water cooled)
- Substrate Cooling (optional)
- Intuitive touch screen to control the coating process
- User friendly software that can be updated via network
- Control coating rate to achieve finer grain structures
- Manual or automatic Timed and Thickness deposition
- Electronically controlled shutter
- Electronic control of gas purge and vent
- Easy-to-change specimen stages (rotation stage is optional)
- 2-year Factory Warranty
Touch Screen Controls
All coaters come equipped with a 7” touch screen and fully automatic control allowing easy operation even by inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coatings is also saved in the history page.
Thermal Evaporation Sources (boat / basket / coil)
The DTT Desktop Thermal Evaporation Coater can be equipped with different source holders fsuch as Boats, Baskets, Coils from most traditional suppliers depending on the user requirements. The design of the evaporation source holder results in no contamination from source materials onto each other. The length of the source holders can be in the range of 5o to 100mm long. Customized sample holder and source holders can easily be adapted.
Sample or Substrate Holders
The DTT Desktop Thermal Evaporation Coater is provided with a standard substrate holder with masks for rectangle and circular coating. Customized substrate holders with “mask” are simple to fabricate or can be provided at optional added cost. Sample holders typically used in SEM such as those from MicroToNano can be easily adapted for repetitive fixation of substrates and samples.
| DTT | |
|---|---|
| Vacuum (90 L/sec TMP) | 0.5 x E-6 Torr |
| Vacuum (350 L/sec TMP) | 0.5 x E-7 Torr |
| Fore Pump Options | RVP (standard), Diaphragm, Scroll |
| Source Holders | Boats, Baskets, Coils |
| Number of Sources | 3 |
| Holder Length | 50 to 100 mm |
| Chamber Size (standard) | 300mm D x 250mm H |
| Chamber Height (optional) | up to 500mm H |
| Power Supply | 25V DC, 0-100A |
| Power Supply options | multiple (co-evaporation) 0-150A |
| Process Gas | Ar, O, N |
| Water Cooling | Power Feed-Throughs (substrate- optional) |
| Rotate Stage | Optional |
| Substrate Heating | up to 500°C |
| Thickness Monitor | Standard |
| Input Power | 220V 1 Phase 20A |
| Coater Dimensions (mm) | 650(W)x500(D)x560(H) |
| Shipping Weight | 60 kg |