Technical Specifications
| Specification | Value |
|---|---|
| Chamber Type | Borosilicate Glass, Ø170 × 140 mm (H) |
| Sputtering Source | 2" DC Magnetron Cathode |
| Target Material | Au, Pd, Pt, Ag (optional Cu, Ni) |
| Film Thickness Monitor | Quartz Crystal Microbalance (QCM), 1 nm resolution |
| Process Control | 7" Color Touchscreen + PLC Control |
| Vacuum Pump | Rotary Vane Pump (Optional Turbo Pump) |
| Power Input | 220–240 V / 50–60 Hz or 110 V available |
| Dimensions | 480 × 420 × 370 mm (W × D × H) |
| Weight | Approx. 30 kg |