Oxford Xplore Compact EDS for Tabletop SEM

The Xplore EDS from Oxford Instruments for the EM-30 Tabletop SEM uses Oxford’s renowned AZtec software platform for simple or advanced Elemental Micro-Analysis with a large 30mm2 detector size. The Oxford AZtec software is available in 3 versions with the Xplore EDS detectors to suit different user requirements from basic to advanced EDS micro-analysis.

Adding Oxford EDS to your SEM turns it into a very powerful analytical tool allowing a multitude of capabilities using advanced micro-analysis features for elemental analysis. With the most optimal take-off angle of any Tabletop SEM, the EDS signal is collected at an optimum solid angle unlike other tabletop SEM designs.

EM-30AX Series Tabletop SEM with Oxford X-Act and AZtecOne software
Oxford Xplore Compact EDS for Tabletop SEM


Main Specifications of Oxford Xplore EDS

  1. High speed SDD Dectector (No LN2 required)
  2. Energy resolution: Less than 129 eV (at Mn Ka)
  3. Detector area: 30mm²
  4. Element detection range: B(5) – Cf(98)
  5. Maximum input count rate: > 1,000,000 cps
  6. Software: Qualitative or Quantitative  Analysis
  7. Live Spectrum Viewer and Mapping (AZtecLiveOne)
  8. Automated Feature/Particle Analysis (AZtecLiveLite + Feature)
  9. Automated Large Area EDS Mapping (AZtecLiveLite + LAM)
  10. Analysis Modes:  Point, Circle, Polygon, Line Scan, Mapping

To learn more about the Oxford Xplore EDS, visit Oxford's website:

Oxford Xplore EDS website


3 Versions to meet any Application Requirement

  • AZtecOne allows basic EDS functionality for Micro-Analysis (Point & ID, Mapping, and LineScan)
  • AZtecLiveOne adds the ability to see a "live" chemical analysis using stage control to navigate within the sample
  • AZtecLiveLite provides the ability to add any of Oxford's numerous advanced software package now or in the future providing almost all of the same capabilities as Oxford's AZtecLive software:
Oxford Xplore EDS software features

Point / Area Composition

  • The software has easy to use features for Composition Analysis at Points, Rectangles, Circles and Polygons
  • Fast and accurate qualitative or quantitative analysis with standard-less quantification is standard
  • Tru-Q® algorithms optimized to improve quantified results


  • Fast and high resolution mapping analysis with Oxford's datacube
  • Mapping provides the function of analyzing the distribution of elements
  • Maps of individual element distribution can be broken out and saved separately
  • Various user settings for saving formats, colors, depth, filters, and more

Line Scan

  • Draw ROI (region of interest) with a line and analyze elements along that line
  • Easy to compare the elemental difference along ROI with line profile graph
  • Very useful for cross-section thickness analysis of multi-layer samples including the mixing zone
  • Various user settings for saving formats, colors, line scan width, filters and more


  • Quick and easy reporting functionality
  • One-click saving of reports in MS Word