Oxford Xplore EDS – AZtecOne for Full-Size SEM

The Xplore EDS series from Oxford Instruments is available in 2 models for the CX-200 series Full-Size SEM utilizing Oxford’s renowned AZtec software platform with 4 levels of software for simple to advanced Elemental Micro-Analysis.  The Xplore model is available in 2 sizes – an economical 15mm2 detector with AZtecONE software or a 30mm2 detector with one of 3 AZtecLIVE operating software platforms.  These affordable EDS compliments Oxford’s flagship EDS, the Ultim® Max series which is also available for the CX-200plus.

Adding Oxford EDS to your SEM turns it into a very powerful analytical tool allowing a multitude of capabilities using advanced micro-analysis features for elemental analysis. With the an optimal take-off angle, the EDS signal is collected at an optimum solid angle.

Oxford Xplore EDS


Main Specifications of Oxford AZtecOne EDS

  1. High speed SDD Dectector (No LN2 required)
  2. Energy resolution: Less than 129 eV (at Mn Ka)
  3. Detector area: 15 or 30 mm² 
  4. Element detection range: Be(4) – Am(95)
  5. Maximum input count rate: > 1 million cps
  6. Software: Qualitative or Quantitative  Analysis
  7. Analysis Modes:  Point, Circle, Polygon, Line Scan, Mapping
  8. Optional Advanced Software for automated analysis

To learn more about the Oxford Xplore EDS, visit Oxford's website:

Oxford XPLORE website


Point / Area Composition

  • The software has easy to use features for Composition Analysis at Points, Rectangles, Circles and Polygons
  • Fast and accurate qualitative or quantitative analysis with standard-less quantification is standard
  • Tru-Q® algorithms optimized to improve quantified results


  • Fast and high resolution mapping analysis with Oxford's datacube
  • Mapping provides the function of analyzing the distribution of elements
  • Maps of individual element distribution can be broken out and saved separately
  • Various user settings for saving formats, colors, depth, filters, and more

Line Scan

  • Draw ROI (region of interest) with a line and analyze elements along that line
  • Easy to compare the elemental difference along ROI with line profile graph
  • Very useful for cross-section thickness analysis of multi-layer samples including the mixing zone
  • Various user settings for saving formats, colors, line scan width, filters and more


  • Quick and easy reporting functionality
  • One-click saving of reports in MS Word