EDAX Element EDS

The EDAX Element EDS with APEX™ software for simple or advanced Elemental Micro-Analysis

Adding EDS to your SEM turns it into a very powerful analytical tool allowing a multitude of capabilities using advanced micro-analysis features for elemental analysis. The EDAX APEX™ software provides numerous capabilities for probing the samples composition, thickness and mapping of elements as shown in the screenshots and explanations below.


Main Specifications of Element EDS

  1. High speed embedded type SDD Dectector (No LN2 required)
  2. Energy resolution: Less than 133 eV (at Mn Ka)
  3. Detector area: 30mm
  4. Window: Silicon Nitride (Si3N4)
  5. Element detection range: Be(4) – Am(95)
  6. Maximum input count rate: > 300 kcps
  7. Software: Qualitative or Quantitative  Analysis
  8. Analysis Modes:  Point, Circle, Polygon, Line Scan, Mapping
  9. Touch Screen Mode


The APEX™ software is an idealized program developed for first-time users with analysis functions for Point and Area Qualitative or Quantitative Elemental Analysis, Mapping, Line Scan, and built-in Reporting.  APEX™ is designed with a “project” methodology.

EDAX Element EDS with APEX Software - Project

Intuitive and Adjustable User Interface

Operators can start based on inspection settings as they have saved and analysis processes can be accomplished with minimal effort.  “Only 3 clicks” needed tof collecting a Spectrum to Qualitative, Quantitative analysis, and saving.  Multiple screen layouts are easily set with a single mouse click.  Background colors can be set for either a light or dark preference.

EDAX Element EDS with APEX Software
EDAX Element EDS with APEX Software

Qualitative / Quantitative analysis

  • Able to know the element and amount about unknown sample in a short time (within 1 min)
  • Get information of the area to see fast and easily by various scanning method (point, area…).
  • Reliable element analysis and 3 types of comparison charts or tables listing elements by Weight (wt%), Atomic (at%), Error (%)
  • ZAF corrections and analysis result tables

Multi-Point analysis

  • Mark several locations to inspect in the sample by point, area or other scanning method
  • Analyze and save automatically
  • Enhance reliability of analysis result by realizing 4 analysis conditions of selected area
EDAX Element EDS with APEX Software - Quantification

High Speed Mapping

  • Analyze the distribution of elements easily of samples with different color coding
  • Obtain desired information in real time at low resolution or at higher resolution with short analysis times
EDAX Element EDS with APEX Software - Mapping

Line Scan

  • Another way to check elements distribution of sample. Analyze with the line set by user and assort the distribution of each element clearly.
  • Create SEM Image Line-scan overlap & Element Profile


  • After acquiring results, reports can be generated per user requirements showing any of the acquired data in various formats
  • Ability to modify or edit by saving original file in MS Word, Excel, or PowerPoint formats, or PDF