High Resolution console style SEM (Scanning Electron Microscope)
The CX-200plus is a full-size floor model Scanning Electron Microscope (SEM) that both new and experienced users will find suitable for many type of demanding research and quality control requirements. The standard supplied configuration of the CX-200plus includes both SE and BSE imaging detectors as well as an internal chamber view camera for easy stage tilt and height adjustments. The CX-200plus offers high resolution imaging capabilities at a very attractive price. After evaluating the CX-200plus, your search for the most cost effective solution will be an easy decision.
The CX-200plus is available with numerous analytical options for EDS and WDS elemental micro-analysis; EBSD micro-structure crystalline analysis; and CL (cathodoluminescence) internal structure analysis. Automated analysis capabilities for features and particles are available through our EDS partners.
The CX-200plus provides a unique “Panorama” mode that allows the SEM to collect high resolution images of large samples by controlling the motorized stage at higher magnification and automatically collect large images from several to thousands of tiled images. This capability if very useful for applications such as detailed examination or metrology of semiconductors and electronic assemblies as well as producing images that can be printed in poster or wall sizes with high definition.
Optional Analytical Detectors:
EDS and WDS Elemental Analysis – EBSD – Cathodoluminescence (CL)
Sample Holders – Cooling Stage – Plasma Cleaning – Anti-Vibration platform
SE (Secondary Electron) and BSE (Backscatter Electron) Imaging
Capture images with Surface and Topographic details (SE) or Atomic Weight contrast (BSE)
Functional Ease-of-Use Features
The NanoStation 4.0 software offers the novice user a simple and clean interface free of clutter while the more advanced user can easily access features allowing further control of the microscope functions. With the intuitive software, users are able to view and save images quickly and easily with great detail.
In the lower left corner, either the standard chamber view camera view or sample holder schematic is displayed. In the upper left corner of the interface, the Mini Map is an image collected at the lowest magnification desired for the field of view or area of interest. As the user navigates to other location on the sample and at higher magnifications, the location of the current field of view is indicated on the Mini Map (yellow rectangle).
All of the “slider” controls can be easily adjusted by using a variety of techniques – dragging the indicator, using the mouse scroll wheel, a +/- button, the keyboard or the “auto” feature.
In addition to keyboard shortcuts preferred by advanced users for some functions like focus, the software gives easy access to all microscope and imaging adjustments via mouse click or mouse scroll wheel. All of the various functional control groups are logically organized on the software interface with less common settings located out of view on secondary windows.
CHAMBER CAMERA and 10 ACCESSORY PORTS
The CX-200plus SEM arrive standard with a CCD Chamber Camera included. The SEM chamber offers 10 Accessory Ports. Some of these are used for standard components such as imaging detectors and chamber camera. Other ports are specifically located for EDS and EBSD while others can be used for accessories such as our STEM detector, Cooling stage, or other customized functions. The chamber allows samples as large as 160mm with reduced stage movement.
SAMPLE POSITIONING STAGE
The CX-200plus SEM is delivered with a standard 5-axis stage with automated “click and move” XYZRT sample positioning for the ultimate in flexibility. Control of the 5 directions is done thru the software interface and utilizes the sample dimensions to prevent collisions with internal chamber accessories.
The Tilt function is extremely useful for examining topography of flat samples. The Tilt function is compucentric such that the X axis is adjusted during tilt to maintain the specimen region of interest (ROI) in the field of view. The compucentric tilt function provides more versatility and time savings with its easier use especially for inexperienced users.
The automatic controlled stage also enables the CX-200plus to offer a unique “Panorama” mode that allows the SEM to collect high resolution images of large samples by controlling the motorized stage at higher magnifications. Very useful for applications such as details examination or metrology of semiconductors and electronic assemblies.
The stage is able to handle large samples (up to 160mm) or sample holders for multiple samples. The observable area is 110mm.
IMAGE METROLOGY TOOLS
Image Metrology or Measurements are extremely flexible and accurate with the CX-200 series of SEM. Extensive calibration is factory performed at multiple magnifications, working distances, beam energies and more that results in measurement errors of less than 1%. Detailed calibration reports come with each system’s documentation making the CX-200plus a valuable tool that can be easily certified and accepted in your workflow.
The software provides quick access to all of the common measure tools such as:
- Area (rectangle, circle, polygon)
In addition, a Line Scan function (pictured at right) can be used for very detailed and precise measurements using the variation in each pixels brightness to accurately determine the true location of edges and features.
EDS Micro-Analysis Options
Oxford EDS Micro-Analysis
Ultim® Max SDD EDS with 40, 65, 100 or 170 mm² detector and AztecLive Software
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Oxford EDS Micro-Analysis
X-ACT or X-MaxN SDD EDS with 10 or 20 mm² detector and AztecOne Software
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Cold Stage sample platform for the EM-30 improves imaging of moist or biological samples, -25°C to 50°C temperature range
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Sample Exchange Airlock
Ambient and Cryo sample exchange preventing air exposure to samples
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Specifications for CX-200plus SEM
|ELECTRON BEAM SYSTEM|
|Live Focus Image Sizes||
|Image Capture Sizes||
|Maximum Sample Size||
|Roughing Vacuum Pump||
|High Vacuum Pumps||