Bruker EDS – XFlash® 630

The XFlash® 630 series from the expansive line of Bruker EDS systems is available in 2 models for Tabletops SEM (630H Compact) and Full-Size SEM (630N slide type) using the ESPRIT Compact software for simple or advanced Elemental Micro-Analysis

Adding Bruker EDS to your SEM turns it into a very powerful analytical tool allowing a multitude of capabilities using advanced microanalysis features for elemental analysis. With the most optimal take-off angle of any Tabletop SEM, the EDS signal is collected at an optimum solid angle unlike other tabletop SEM designs.

The Bruker ESPRIT Compact software provides numerous capabilities for probing the samples composition, thickness and mapping as shown in the screenshots and explanations below.

EM-30AX Series Desktop SEM EDS with Bruker Nano XFlash 630 and Esprit software
Bruker ESPRIT EDS video demonstration

Video’s demonstrating operation of the Bruker ESPRIT software are available upon request – please Contact Us for access instructions


Main Specifications of XFlash® 630 EDS

  1. High speed embedded type SDD Dectector (No LN2 required)
  2. Energy resolution: Less than 129 eV (at Mn Ka)
  3. Detector area: 30mm
  4. Element detection range: B(5) – Am(95)
  5. Maximum input count rate: > 150 kcps
  6. Software: Qualitative or Quantitative  Analysis
  7. Analysis Modes:  Point, Circle, Polygon, Line Scan, Mapping
Bruker XFlash EDS


Point / Area Composition

  • The software has easy to use features for Composition Analysis at Points, Rectangles, Circles and Polygons
  • Fast and accurate qualitative or quantitative analysis with calibration capability is standard
  • Enhanced Deconvolution capabilities greatly improve quantified results


  • Fast and high resolution mapping analysis with Bruker’s HyperMap
  • Mapping provides the function of analyzing the distribution of elements
  • Maps of individual element distribution can be broken out and saved separately
  • Spectra for each pixel are saved in a database for later recall and manipulation of point or line scan analysis
  • Various user settings for saving formats, colors, depth, filters, and more

Line Scan

  • Draw ROI (region of interest) with a line and analyze elements along that line
  • Easy to compare the elemental difference along ROI with line profile graph
  • Very useful for cross-section thickness analysis of multi-layer samples including the mixing zone
  • Various user settings for saving formats, colors, line scan width, filters and more


  • A variety of reporting formats are provided that can be edited as desired
  • One-click saving of reports in Word or PDF
Bruker ESPRIT report generation