Great article from Microscopy Today explains tips on getting good cross sectioned samples for SEM analysis.

ABSTRACT: Preparing cross sections of particulates and wires for scanning electron microscopy study without inducing mechanical damage is difficult. Embedding materials in commercially available epoxy before polishing with a broad unfocused ion beam (like CP-8000 Cross Section Ion Mill) is a simple and inexpensive way to produce a cross section with minimal preparation artifacts. A step-wise procedure is provided for embedding and polishing powders, larger particles, and wires.

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Payne, S., & Moore, J. (2018). Preparation of Cross Sections of Difficult Materials for SEM Imaging. Microscopy Today, 26(3), 40-45. doi:10.1017/S1551929518000500