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Great article from Microscopy Today explains tips on getting good cross sectioned samples for SEM analysis. ABSTRACT: Preparing cross sections of particulates and wires for scanning electron microscopy study without inducing mechanical damage is difficult. Embedding materials in commercially available epoxy before polishing with a broad unfocused ion beam (like CP-8000 Cross Section Ion Mill) is a [...]

In order to acquire the best analytical results for microstructure, metrology or micro-elemental analysis, specimens are often mounted in a resin "puck" and polished to a mirror finish.  The resin mount is often precision sectioned to expose critical areas of interest that lie within the specimen.  This process assures that a flat oxide-free layer [...]