Sputter Coater Systems

DST2-TGB

Glovebox Sputter and Thermal

The DST2-TG, Double-target Turbo Pumped Sputter Coater with Thermal evaporator for Glove box use, is a multi-vacuum coater system that combines thermal evaporator and sputter coater in one single compact desktop system with remote system control through a Wi-Fi connection, controllable by both touch screen and PC. The high vacuum system is suitable for the deposition of a wide range of materials.

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Glove box systems provide

Glove box systems provide a protected environment for sensitive material, preventing any contact with air or humidity and unwanted interactions. DST2-TG high-vacuum coating system with glove box offers safe and clean substrate handling before or after a deposition process under inert gas atmosphere, and a highly controllable chamber environment, contributing to high purity thin layer deposition under high vacuum conditions.

Sputter Coater Systems

DST2-TGB

Features and Main Options

  • Combination of sputter coater and thermal evaporator for glovebox mounting
  • Built-in turbomolecular pump
  • Large chamber: Dia. 30 cm, Height. 20-25 cm
  • Easy and quick target installation: No target holder needed
  • Boosted heat conduction utilizing targets with backing plate
  • Rotating sample holder
  • Glovebox mounted KF40 feedthroughs for power supplies (DC, RF, high current), vacuum pump hose, water cooling and argon/reactive gas connections, and electrical connections.
  • Gas injection control through MFCs
  • Two-precision quartz crystal thickness sensors
  • Vac coat Products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
  • Semi-Fully automatic coating process (optional)
  • Ability to rapidly enter and store deposition process data
  • Controlling the deposition process from pc through a Wi-Fi connection
  • Storing coating recipes for repeatable depositions
  • Electronic shutters
  • Automated cathode selection
The DST2-TG, Magnetron Desk Sputter Coater, is equipped with a large chamber (300 mm diameter) and two 2” diameter water-cooled cathodes which make it suitable for long-time deposition. The DST2-TG is a single platform for sputtering, carbon fiber, and metal evaporation. The desk sputter coater for glove box can sputter semiconductors, dielectrics, and metal targets. Sputtering cathodes and thermal evaporation boats could be installed together or interchangeably, with an overall three deposition sources accessible. Carbon deposition is also made possible by utilizing carbon fiber.
  • RF sputtering for deposition of non-conducting targets (optional)
  • Plasma cleaner (optional)

This high-precision vacuum coating system is semi/fully automated, equipped with a 7” colored touch-screen panel using user-friendly software to control and adjust the deposition process data. The panel window is also made available on pc through a Wi-Fi connection. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen and the last 300 coatings are saved on the history page.

 

 

The sputter coater and thermal evaporator for glove box can be equipped with optional facilities including:

  • RF power supply with an auto-adjustable matching box which minimizes the reflected power in the RF sputtering process
  • Plasma cleaner for removing organic matter from the substrate surface before thin film deposition 
The vacuum chamber is Cylindrical Pyrex. The DST1-170 is fitted with an internally mounted 90 L/s turbomolecular pump, backed by a 6m3/h two stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.

DST2-TGB More Info

Turbo-Pumped Sputter Coater

Desktop SEM/TEM Sputter Coater

Sample preparation using sputter coating is the recognized method for non-conductive and low conductive specimens or samples.

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Element Pi Products

Revolutionary desktop coater with adjustable thickness, speed control, touchscreen, and user-friendly. For a professional-grade finish on various materials. Ideal for beginners and veterans. Invest for an affordable printing solution.

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