Sputter Coater Systems

DST1-300

Magnetron Desk Sputter Coater

The Element Pi triple thermal source desktop coater provides a very versatile thermal evaporation system for a vast range of source materials in various forms from wire, cord, pellets and powders, compatible with Boat/basket and coil source holders.

Sputter Coater SEM Principle
The DST1-300 range provides the following versions to satisfy most laboratory applications.

  • DST1-300 Single magnetron, DC, RF, sample Bias, sample heating, Sample rotation
  • DST2-A Two magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation

  • DST2-TA Two magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
  • DST2-S Two magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.

  • DST2-TS Two magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
  • DST3-A  Three magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation.
  • DST3-TA  Three magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
  • DST3-S Three magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation.
  • DST3-TS Three magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation for carbon, wire or boat.
  • 4″ magnetron option is also available.

Sputter Coater Systems

DST1-300

Features and Main Options

  • High vacuum turbomolecular pump
Pumping Speed
90 l/s
350 l/s
Ultimate Pressure
7 x10-6  Torr
7×10-7 Torr
  • Two stage rotary vane pump as a backing pump
  • Full range vacuum gauge (Leybold)
  • High precision quartz crystal thickness monitor
  • DC power supply 600W
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Controls coating rate to achieve finer grain structures
  • Manual or automatic Timed and Thickness sputtering
  • GLAD Sputtering
  • Plasma Cleaning
  • Able to record and plot coating parameters graphs
  • Equipped with electronic shutter
  • Easy-to-change specimen stages (rotation stage as standard)
  • Two-year warranty
  • Vac coat Products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
  • Metal, Semiconductor and Dielectric Films
  • Nano & Microelectronic
  • Solar cell applications
  • Optical components coating
  • Thin film sensors
  • Magnetic thin film devices
  • Computer memory applications
  • Fine grain structural deposition for SEM & FE-SEM sample preparation
  • Controls the rate of sputtering to achieve finer grain structure
  • Automatically controls the power of sputtering independent of pressure
  • Two precision Mass Flow Meter (MFC) for fine control of the vacuum pressure
  • Able to record and plot coating parameter graphs
  • Transfer curves and deposition process data by USB port to PC
  • Utilities: 220V-240V, 50/60HZ, 16A
  • Dimensions: 58 Cm H x 50 Cm W x 63 Cm D
  • Shipping Weight: 50kg
 
  • Substrate bias voltage
  • RF generator and auto matching box
  • Substrate heater 500 C
  • Quartz crystal sensor
  • Vacuum cylindrical spare glass chamber
  • One source thermal evaporation system
  • Sputtering targets
  • Sealing gaskets

The DST1-300 is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current, and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

 

The DST1 can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens (optional).
 
The vacuum chamber is Cylindrical Pyrex with 300 mm OD and 200 mm H. The DST1-300 is fitted with an internally mounted 90 l/s turbomolecular pump, backed by a two stage rotary pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump. 

DST1-300

Magnetron Desk Sputter Coater

Sputter Coater Systems

This vacuum evaporator with its suitable dimensions is capable of reaching the desired pressure in a short time and coating process can take place within a few minutes. It is suitable for research, laboratory and electron microscopy applications.
 

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Element Pi Products

Revolutionary desktop coater with adjustable thickness, speed control, touchscreen, and user-friendly. For a professional-grade finish on various materials. Ideal for beginners and veterans. Invest for an affordable printing solution.

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616-550-2556

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